TITLE

Radio frequency multicusp ion source development (invited)

AUTHOR(S)
Leung, K.N.
PUB. DATE
March 1996
SOURCE
Review of Scientific Instruments;Mar96, Vol. 67 Issue 3, p1302
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Reports on the development of a radio frequency multicusp ion source. Schematic diagram; Operating principles; Production of high brightness negative hydrogen ion beams; Beam emittance and longitudinal ion energy spread measurements; Production of positive boron ions for ion implantation application.
ACCESSION #
4367293

 

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