TITLE

A compact coaxial electron cyclotron resonance plasma source

AUTHOR(S)
Baskaran, R.; Jain, S.K.; Ramamurthy, S.S.
PUB. DATE
March 1996
SOURCE
Review of Scientific Instruments;Mar96, Vol. 67 Issue 3, p1243
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Reports on the construction of a compact coaxial electron cyclotron resonance plasma source for plasma deposition experiments. Profiles of the magnetic field in the plasma chamber; Plasma density as a function of the solenoid coil current; Electron temperature; Plasma parameters for the conical and cylindrical stub.
ACCESSION #
4367273

 

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