TITLE

Hollow cathode magnetron ion source with axial extraction

AUTHOR(S)
Milijevic, Vujo I.
PUB. DATE
March 1996
SOURCE
Review of Scientific Instruments;Mar96, Vol. 67 Issue 3, p1224
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Studies magnetron ion source with a hollow mesh cathode and an axial extraction. Current of the ion source; Width of the diameter exit aperture; Extraction voltage; Hollow cathode magnetron discharge.
ACCESSION #
4367266

 

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