TITLE

An 18-cm-diam intense beam current broad beam ion source for surface modifications (abstract)

AUTHOR(S)
Feng, Y.C.; Li, X.G.
PUB. DATE
March 1996
SOURCE
Review of Scientific Instruments;Mar96, Vol. 67 Issue 3, p1217
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Discusses an abstract describing the use of a large diameter intense beam current broad beam ion source for surface modifications. Components of the ion source; Divisions of the discharge chamber; Beam current extraction voltages for hydrogen and argon.
ACCESSION #
4367263

 

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics