TITLE

Construction of mini-ECRIS for the JAERI 400 kV ion implanter

AUTHOR(S)
Saitoh, Y.; Yokota, W.
PUB. DATE
March 1996
SOURCE
Review of Scientific Instruments;Mar96, Vol. 67 Issue 3, p1174
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes the design and construction of a compact medium-multiply charged ions for the extension of ion beam energies. Maximum ion beam current extraction; Size of the plasma chamber; Magnetic field distribution; Obtainment of continuous beam current for H[sup +] from residual gas plasma.
ACCESSION #
4367244

 

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