TITLE

Numerical simulation of ion-beam formation (invited)

AUTHOR(S)
Becker, Reinard
PUB. DATE
March 1996
SOURCE
Review of Scientific Instruments;Mar96, Vol. 67 Issue 3, p1132
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents a numerical simulation of ion-beam formation. Accuracy of numerical simulation methods; Space-charge allocation; Simulation of the plasma sheath; Pierce angle and its equivalent for ion extraction; Space charge compensation.
ACCESSION #
4367229

 

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