TITLE

Microwave-driven multipurpose ion source

AUTHOR(S)
Jayamanna, K.; Yuan, D.; Kuo, T.; McDonald, M.; Schmor, P.W.; Dutto, G.
PUB. DATE
March 1996
SOURCE
Review of Scientific Instruments;Mar96, Vol. 67 Issue 3, p1061
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Reports on the development of a microwave-driven multipurpose ion source. Schematic diagram of the experimental set-up; Dependence of the plasma ignition on the design of the electric field cavity; Measurement of beam current and gas efficiency; Long-term stability measurement.
ACCESSION #
4367211

 

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