Negative-ion extraction of gaseous materials from a radio frequency plasma-sputter-type heavy

Tsuji, Hiroshi; Ishikawa, Junzo; Tomita, Tetsuo; Gotoh, Yasuhito
March 1996
Review of Scientific Instruments;Mar96, Vol. 67 Issue 3, p1012
Academic Journal
Presents the operational characteristics of a radio-frequency plasma-sputter-type heavy negative-ion source. Oxygen gas feeding; Sulfur hexa-fluoride gas feeding; Schematic diagram of the negative ion source; Extraction of negative ions in a direct-current mode operation.


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