Characteristics of a nozzle-beam-type microwave radical source

Yoshida, Yoshikazu
March 1996
Review of Scientific Instruments;Mar96, Vol. 67 Issue 3, p1006
Academic Journal
Describes the characteristics and application of an antenna-nozzle-type microwave radical source. Operating principle of the radical source; Atomic oxygen flux; p-type doping of zinc selenide thin films; Power dependence of the atomic oxygen flux; Applications of the radical source for nitrogen doping.


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