Small microwave ion source for an ion implanter

Zhizhong Song; Dong Jiang; Jinxiang Yu
March 1996
Review of Scientific Instruments;Mar96, Vol. 67 Issue 3, p1003
Academic Journal
Reports on the development of three kinds of small microwave ion sources for a middle current implanter. Prototype microwave ion source; Improved prototype microwave ion source; Microwave ion source with permanent magnet; Role of the dielectric window.


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