Formation of rectilineary wide plasmas by a slotted waveguide under electron cyclotron resonance

Ishii, S.; Wakatsuchi, M.; Kato, Y.; Tani, F.; Sunagawa, M.
March 1996
Review of Scientific Instruments;Mar96, Vol. 67 Issue 3, p997
Academic Journal
Reports on the development of a plasma source for ion implanters capable of irradiating large-area substrates. Calculation of radiation patterns of the antenna in near fields; Analysis of measured profiles of electron density; Variations of electron density and temperature.


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