Electron beam evaporation broad beam metal ion source for material modifications

Feng, Y.C.; Li, X.G.; Yang, S.T.
March 1996
Review of Scientific Instruments;Mar96, Vol. 67 Issue 3, p924
Academic Journal
Describes a type of electron beam evaporation intense beam current broad beam metal ion source. Principle and structure of the ion source; Characteristics and performance of the finite-difference time-domain technique to model the microwave fields with excite the plasma; Determination of the distribution function for the electron energy change.


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