Review of high brightness ion sources for microlithography (invited)

Dudnikov, V.G.
March 1996
Review of Scientific Instruments;Mar96, Vol. 67 Issue 3, p915
Academic Journal
Re-evaluates modern high brightness ion beam production for microlithography and trends of research and development in this field. Ion sources for focused beam lithography; Ion sources for ion projection lithography; Estimation of energy spread growth and the decline in brightness by intrabeam interaction of ions; Features of negative ion formations.


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