TITLE

Review of high brightness ion sources for microlithography (invited)

AUTHOR(S)
Dudnikov, V.G.
PUB. DATE
March 1996
SOURCE
Review of Scientific Instruments;Mar96, Vol. 67 Issue 3, p915
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Re-evaluates modern high brightness ion beam production for microlithography and trends of research and development in this field. Ion sources for focused beam lithography; Ion sources for ion projection lithography; Estimation of energy spread growth and the decline in brightness by intrabeam interaction of ions; Features of negative ion formations.
ACCESSION #
4367158

 

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