TITLE

A novel rectilinear ion source for direct metal ion beam deposition (abstract)

AUTHOR(S)
Kim, S.I.
PUB. DATE
March 1996
SOURCE
Review of Scientific Instruments;Mar96, Vol. 67 Issue 3, p908
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Reports on the development of a novel rectilinear ion beam deposition technique for the direct metal ion beam deposition over a large area using solid-state cesium ion beam technology. Advantages of the technique; Prototype of the ion source.
ACCESSION #
4367155

 

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