TITLE

Wave form analysis of constant capacitance-voltage transient deep level transient spectroscopy

AUTHOR(S)
Okamoto, Y.; Yonekura, H.; Morimoto, J.; Miyakawa, T.
PUB. DATE
March 1996
SOURCE
Review of Scientific Instruments;Mar96, Vol. 67 Issue 3, p809
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Proposes a version of the constant capacitance-voltage transient (CCVT) method to study the emission rate spectrum of deep impurity levels in semiconductors. Use of nonlinear least-squares program to analyze emission rate spectrum; Feasibility of the method for a gold-doped silicon diode.
ACCESSION #
4367129

 

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