TITLE

Multicusp type machine for electron cyclotron resonance plasma with reduced dimensions

AUTHOR(S)
Amemiya, H.; Maeda, M.
PUB. DATE
March 1996
SOURCE
Review of Scientific Instruments;Mar96, Vol. 67 Issue 3, p769
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes a multicusp type machine for electron cyclotron resonance (ECR) plasma with reduced dimensions. Electron energy distribution; Features of the multicusp ECR; Plasma ion density.
ACCESSION #
4367122

 

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