An electron imaging approach to soft-x-ray transmission spectromicroscopy

De Stasio, Gelsomina; Lorusso, G.F.; Droubay, T.; Kohli, M.; Muralt, P.; Perfetti, P.; Margaritondo, G.; Kelly, T.F.; Tonner, B.P.
March 1996
Review of Scientific Instruments;Mar96, Vol. 67 Issue 3, p737
Academic Journal
Discusses the testing of a soft-x-ray transmission spectromicroscopy technique. Testing of silicon features over silicon nitride substrates; Lateral and energy resolutions; Transmission curves as a function of photon energy; Chemical nature of the contrast; Optimum thickness of the Au photocathode.


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