A new gas purifier for ArF excimer lasers

Ito, S.; Saito, T.; Tada, A.
March 1996
Review of Scientific Instruments;Mar96, Vol. 67 Issue 3, p658
Academic Journal
Reports on the development of a gas purifier for ArF excimer lasers that can remove all the impurities from degraded excimer ArF excimer laser gas. Effective removal of CF4 by cool activated charcoal at temperatures below negative 50 degrees; Regeneration of the ArF excimer laser gas up to its initial purity level; Operational characteristics of the gas purifier.


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