TITLE

Piezoelectric aluminum nitride nanoelectromechanical actuators

AUTHOR(S)
Sinha, Nipun; Wabiszewski, Graham E.; Mahameed, Rashed; Felmetsger, Valery V.; Tanner, Shawn M.; Carpick, Robert W.; Piazza, Gianluca
PUB. DATE
August 2009
SOURCE
Applied Physics Letters;8/3/2009, Vol. 95 Issue 5, p053106
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
This letter reports the implementation of ultrathin (100 nm) aluminum nitride (AlN) piezoelectric layers for the fabrication of vertically deflecting nanoactuators. The films exhibit an average piezoelectric coefficient (d31∼-1.9 pC/N), which is comparable to its microscale counterpart. This allows vertical deflections as large as 40 nm from 18 μm long and 350 nm thick multilayer cantilever bimorph beams with 2 V actuation. Furthermore, in-plane stress and stress gradients have been simultaneously controlled. The films exhibit leakage currents lower than 2 nA/cm2 at 1 V, and have an average relative dielectric constant of approximately 9.2 (as in thicker films). These material characteristics and actuation results make the AlN nanofilms ideal candidates for the realization of nanoelectromechanical switches for low power logic applications.
ACCESSION #
43594061

 

Related Articles

  • Thin-film piezoelectric MEMS. Eom, Chang-Beom; Trolier-McKinstry, Susan // MRS Bulletin;Nov2012, Vol. 37 Issue 11, p1007 

    Major challenges have emerged as microelectromechanical systems (MEMS) move to smaller size and increased integration density, while requiring fast response and large motions. Continued scaling to nanoelectromechanical systems (NEMS) requires revolutionary advances in actuators, sensors, and...

  • Adaptive vibration control of micro-cantilever beam with piezoelectric actuator in MEMS. Wenming Zhang; Guang Meng; Hongguang Li // International Journal of Advanced Manufacturing Technology;Mar2006, Vol. 28 Issue 3/4, p321 

    This paper proposes a dynamical model and the governing equations of motion of the micro-cantilever beams based MEMS with piezoelectric actuator (PZT). The Rayleigh–Ritz method is used to reduce the order of the system and the state equations are presented in modal space. The first ten...

  • Drive Piezoelectric Actuators With Fast, High-Power Op Amps. Robinson, Sam // Electronic Design;11/7/2005, Vol. 53 Issue 25, p69 

    The article provides information on the design of high-speed piezoelectric actuators. Piezoelectric actuators require high-voltage drivers that can deliver hundreds of volts, peak-to-peak. In addition, because a typical actuator looks virtually like a pure capacitance to the driving amplifier,...

  • High Frequency Piezoelectric Actuators for Automotive Applications. Baurienė, G.; Bubulis, A.; Pilkauskas, K. // Transport Means 2007: Proceedings of the 11th International Conf;2007, p153 

    In the paper the general tendencies of vehicle development as mechatronic systems is shown stressing its characteristic feature - the change of conventional mechanical, electromechanical, hydraulic systems by electronically controlled x-by-wire systems. On the other hand search for new...

  • Tapping mode atomic force microscopy in liquid with an insulated piezoelectric microactuator. Rogers, B.; York, D.; Whisman, N.; Jones, M.; Murray, K.; Adams, J. D.; Sulchek, T.; Minne, S. C. // Review of Scientific Instruments;Sep2002, Vol. 73 Issue 9, p3242 

    Tapping mode atomic force microscopy in liquids is enhanced using an insulated cantilever with an integrated piezoelectric microactuator. When vibrating the cantilever via direct force modulation by the actuator, a single resonance peak appears in the plot of rms cantilever amplitude versus...

  • Development and application of a laterally driven electromagnetic microactuator. Ko, Jong Soo; Lee, Myung Lae; Lee, Dae-Sik; Choi, Chang Auck; Tae Kim, Youn // Applied Physics Letters;7/15/2002, Vol. 81 Issue 3, p547 

    A laterally driven electromagnetic microactuator (LaDEM) is introduced, and a micro-optical switch is designed and fabricated as an application. LaDEM offers parallel movement of the microactuator to the silicon substrate surface (in-plane mode). Polysilicon-on-insulator wafers and a reactive...

  • Electromechanical TiO2 Nanogenerators. Dallacasa, Valerio; Dallacasa, Filippo // Sensors & Transducers (1726-5479);Nov2010, Vol. 122 Issue 11, p102 

    We have developed a nanogenerator that is driven by mechanical forces to produce continuous direct-current output. The nanogenerator was fabricated with titanium dioxide nanoparticle arrays that were placed beneath a conducting electrode with a small gap. The force drives the electrode up and...

  • A novel drum piezoelectric-actuator. Sun, C.L.; Lam, K.H.; Chan, H.L.W.; Zhao, X.-Z.; Choy, C.L. // Applied Physics A: Materials Science & Processing;Sep2006, Vol. 84 Issue 4, p385 

    This paper presents a large displacement, piezoelectric-metal structure actuator, named the piezoelectric drum actuator. The drum actuator consists of a short, thick-walled steel cylinder sandwiched by two thin composite disks, which are fabricated from a brass disk bonded with a piezoceramic...

  • Generation of concentration gradient from a wave-like pattern by high frequency vibration of liquid–liquid interface. Motoo, Kohei; Toda, Naoya; Arai, Fumihito; Fukuda, Toshio; Sekiyama, Kosuke; Nakajima, Masahiro // Biomedical Microdevices;Jun2008, Vol. 10 Issue 3, p329 

    The fast and effective generation of a concentration gradient by mixing in the microchannel is important for many microfluidic applications. The active control of gradient is useful for applying the measurement of cell responses by dynamic change of environment. The main purpose of this paper is...

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics