Charge trap memory characteristics of AlOx shell-Al core nanoparticles embedded in HfO2 gate oxide matrix

Jun Seok Lee; Jung Yup Yang; Jin Pyo Hong
August 2009
Applied Physics Letters;8/3/2009, Vol. 95 Issue 5, p052109
Academic Journal
The memory behavior of natively oxidized AlOx shell-Al nanoparticles (NPs) in a metal oxide semiconductor (MOS) structure was investigated. Transmission electron microscopy images clearly demonstrate the formation of an AlOx shell (thicknesses of 1–1.5 nm), surrounding Al (sizes of 5–7 nm) core NPs in the MOS structure. Electrical measurements exhibited a memory window of 3.6 V, together with a promising charge retention time of about 10 years. A possible band model needed for enhanced retention characteristics was given by considering the electron/hole barrier width and the additional interface states through the AlOx shell as a method of tunneling barrier engineering.


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