TITLE

Real time measurement of current and voltage in discharge pumped KrF excimer lasers

AUTHOR(S)
Onkels, E.D.; Seelig, W.
PUB. DATE
August 1997
SOURCE
Review of Scientific Instruments;Aug1997, Vol. 68 Issue 8, p3250
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents an advanced measurement method for the dynamic current voltage characteristics of fast transversely excited atmosphere excimer laser discharges. Elimination of inductive components from the measured discharge gap voltage; Achieved resolution revealing actual halogen donor concentration.
ACCESSION #
4358638

 

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