TITLE

A miniature single element effusion cell for the vacuum deposition of transition-metal and

AUTHOR(S)
Harris, V.G.; Koon, N.C.
PUB. DATE
August 1997
SOURCE
Review of Scientific Instruments;Aug1997, Vol. 68 Issue 8, p3168
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes the fabrication of a miniature single element effusion cell that allows for the high-vacuum deposition of a variety of transition-metal and rare earth elements. Design and principle of operation of the cell; Special features of the evaporator; Low power demands of the cell.
ACCESSION #
4358623

 

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