Fast wavelength switching of narrow-band excimer lasers

Grebner, D.; Muller, D.; Triebel, W.
August 1997
Review of Scientific Instruments;Aug1997, Vol. 68 Issue 8, p2965
Academic Journal
Describes the development of a novel system which allows one to switch the wavelength of a narrow-band excimer laser between two successive light pulses at a repetition rate of at least 250 hertz. Periodically driven piezo actuator attached to the diffraction grating of the excimer laser; Results of the achieved position accuracy of the gratings.


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