Bendable high-frequency microwave switches formed with single-crystal silicon nanomembranes on plastic substrates

Hao-Chih Yuan; Guoxuan Qin; Celler, George K.; Zhenqiang Ma
July 2009
Applied Physics Letters;7/27/2009, Vol. 95 Issue 4, p043109
Academic Journal
This letter presents realization of bendable rf switches operating at microwave frequencies formed with single-crystal Si nanomembranes (SiNMs) on a plastic substrate. Selectively doped 200-nm-thick SiNM is lifted off from silicon-on-insulator and transferred to a polymer substrate to form lateral P-intrinsic-N (PIN) diodes with minimized parasitic resistances. A single-pole single-throw switch, consisting of two PIN diodes connected in a shunt-series configuration, demonstrated very low insertion loss and high isolation from dc up to 20 GHz. The level of performance indicates a promise of properly processed single-crystal semiconductor nanomembranes for high-frequency applications in a number of consumer and military systems.


Related Articles

  • Field-enhanced Raman scattering by silver nanoparticle with graded SiO2 coating. Liu, Tung-Kai; Tsai, Ming-Shan; Hung, Wen-Chi; Kuo, Chie-Tong; Wang, Dong-Po; Jiang, I-Min // Applied Physics Letters;4/15/2013, Vol. 102 Issue 15, p153105 

    A reusable metallic substrate of surface-enhanced-Raman-scattering (SERS) was fabricated with field-enhancement property. Silver nanoparticles spread on a glass substrate and covered with a graded SiO2 coating were employed to enhance and to modulate the Raman scattering signal of probed...

  • Microwave switchable frequency selective surface with high quality factor resonance and low polarization sensitivity. Dmitriev, Victor; Kawakatsu, Marcelo N. // Journal of Microwaves, Optoelectronics & Electromagnetic Applica;Dec2012, Vol. 11 Issue 2, p263 

    We present a microwave switchable frequency selective surface with high quality factor transmission resonance. The high quality resonance is achieved by excitation of the trapped-mode in array with two concentric metal rings in a cell on a silicon substrate. Optical activation of the silicon...

  • FABRICATION OF THIN DIELECTRIC MEMBRANES FOR MICROWAVE APPLICATIONS. AVRAM, A.; BUNEA, A. C.; OBREJA, C.; AVRAM, M.; BITA, B.; PARVULESCU, C.; POPESCU, M.; NECULOIU, D. // Digest Journal of Nanomaterials & Biostructures (DJNB);Apr-Jun2014, Vol. 9 Issue 2, p475 

    This paper describes the fabrication technology for thin SiO2/Si3N4 membranes on a silicon wafer substrate, with areas ranging from 0.9 mm2 to 34 mm2. The main challenges were the deposition of stress compensated dielectric films, uniform etching of the whole 4 inch wafer, while releasing the...

  • Growth of two-dimensional arrays of uncapped gold nanoparticles on silicon substrates. Das, Anindya; Das, Soma; Raychaudhuri, A. K. // Bulletin of Materials Science;2008, Vol. 31 Issue 3, p277 

    A method of preparing large area patterned 2D arrays of uncapped gold (Au) nanoparticles has been developed. The pattern has been formed using self-assembly of uncapped Au nanoparticles. The Au nanoparticles were synthesized via toluene/water two phase systems using a reducing agent and...

  • The Effect of Deposition Temperature on the Growth of ZnO Nanorods on Porous Silicon using Sol-gel Immersion Method. Amizam, S.; Mamat, M. H.; Khusaimi, Z.; Rafaie, H. A.; Sahdan, M. Z.; Abdullah, S.; Rusop, M. // AIP Conference Proceedings;6/1/2009, Vol. 1136 Issue 1, p676 

    Zinc Oxide (ZnO) nanorods were grown on porous silicon substrate by sol-gel immersion method, which is containing of zinc nitrate hexahydrate (Zn(NO3)2·6H2O) and hexamethylenetetramine (C6H12N4).ZnO Nanorods prepared under the different deposition temperature. The surface morphology and...

  • Sensitivity analysis of nanoparticles pushing critical conditions in 2-D controlled nanomanipulation based on AFM. Korayem, M.; Zakeri, M. // International Journal of Advanced Manufacturing Technology;Jul2009, Vol. 41 Issue 7/8, p714 

    This paper investigates the sensitivity of critical parameters in AFM-based nanomanipulation, including the nanoparticle pushing force and time versus changing all parameters of the nanomanipulation process. The presented model includes both adhesional and normal friction forces. Also, pull-off...

  • Pulsed-laser-induced nc-Si and nc-Si/SiOx core-shell structures on Si substrates. Ma, Y.; Zeng, X. T.; Yu, T.; Zhu, Y.; Shen, Z. X. // Journal of Materials Research;Apr2008, Vol. 23 Issue 4, p25 

    Pulsed-laser-induced Si nanostructures on Si substrates were investigated using third harmonic Nd3+:yttrium aluminum garnet (355nm) laser irradiation under ambient conditions. Nanostructures were found in the laser-irradiated areas as well as in their surrounding areas. The laser-irradiated...

  • Temperature-dependent field emission of flexible n-type silicon carbide nanoneedle emitters. Shanliang Chen; Pengzhan Ying; Lin Wang; Guodong Wei; Weiyou Yang // Applied Physics Letters;9/29/2014, Vol. 105 Issue 13, p1 

    In this work, we reported the temperature-dependent field emission (FE) of flexible n-type SiC nanoneedles grown on the carbon fabric substrates via pyrolysis of polymeric precursor. The obtained n-type SiC nanoneedles with clear and sharp tips were incorporated by N dopants with a uniform...

  • Nanofabrication of arbitrary patterns by nano plastic forming and etching (NPFE). Rashidi, Hassan; Yoshino, Masahiko // International Journal of Advanced Manufacturing Technology;Apr2013, Vol. 66 Issue 1-4, p461 

    In this paper, flexibility of nano plastic forming and etching, an ultra-high resolution nanofabrication process developed recently by the authors, in terms of fabrication of arbitrary patterns as well as applicability to various work materials is demonstrated. First, a thin layer of nickel (Ni)...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics