An infrared imaging method for high-throughput combinatorial investigation of hydrogenation-dehydrogenation and new phase formation of thin films

Oguchi, H.; Hattrick-Simpers, J.; Takeuchi, I.; Heilweil, E. J.; Bendersky, L. A.
July 2009
Review of Scientific Instruments;Jul2009, Vol. 80 Issue 7, p073707
Academic Journal
We have developed an infrared imaging setup enabling in situ infrared images to be acquired, and expanded on capabilities of an infrared imaging as a high-throughput screening technique, determination of a critical thickness of a Pd capping layer which significantly blocks infrared emission from below, enhancement of sensitivity to hydrogenation and dehydrogenation by normalizing raw infrared intensity of a Mg thin film to an inert reference, rapid and systematic screening of hydrogenation and dehydrogenation properties of a Mg–Ni composition spread covered by a thickness gradient Pd capping layer, and detection of formation of a Mg2Si phase in a Mg thin film on a thermally oxidized Si substrate during annealing.


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