Development of a local vacuum system for focused ion beam machining

Masuzawa, Tsuneaki; Yoshida, Yoshikazu; Ikeda, Hiromichi; Oguchi, Keigo; Yamagishi, Hikaru; Wakabayashi, Yuji
July 2009
Review of Scientific Instruments;Jul2009, Vol. 80 Issue 7, p073708
Academic Journal
A local vacuum system for focused ion beam (FIB) processing, with a workpiece set in the air, has been developed. The local vacuum apparatus had a double-wall cylinder structure, used a differential exhaust, and each cylinder was connected to a vacuum exhaust pump. When the gap between the workpiece and the apparatus was 10 μm, the pressure of beam line in the machining head achieved 2.1×10-3 Pa. In addition, a visualization system was developed by visualizing the current flow out from a sample by FIB irradiation. With this system, it is possible to conduct focus adjustments of the FIB and shape recognition on a workpiece in the order of microns.


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