TITLE

Longitudinal bulk acoustic mass sensor

AUTHOR(S)
Hales, J. H.; Teva, J.; Boisen, A.; Davis, Z. J.
PUB. DATE
July 2009
SOURCE
Applied Physics Letters;7/20/2009, Vol. 95 Issue 3, p033506
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A polycrystalline silicon longitudinal bulk acoustic cantilever is fabricated and operated in air at 51 MHz. A mass sensitivity of 100 Hz/fg (1 fg=10-15 g) is obtained from the preliminary experiments where a minute mass is deposited on the device by means of focused ion beam. The total noise in the currently applied measurement system allows for a minimum detectable mass of 0.5 fg in air.
ACCESSION #
43398078

 

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