Highly stabilized sputter deposition of YBa[sub 2]Cu[sub 3]O[sub 7]

Kruger, U.; Kutzner, R.; Wordenweber, R.; Mank, G.; Kraemer-Flecken, A.
March 1993
Applied Physics Letters;3/29/1993, Vol. 62 Issue 13, p1559
Academic Journal
Examines the highly stabilized sputter deposition of YBa[sub 2]Cu[sub 3]O[sub 7] high temperature superconducting thin films. Regulation of plasma by optical emission spectroscopy; Reduction of plasma flicker intensity; Impact of ion bombardment on surface topology.


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