In situ approach to realization of three-dimensionally confined structures via substrate encoded

Madhukar, A.; Rajkumar, K.C.; Chen, P.
March 1993
Applied Physics Letters;3/29/1993, Vol. 62 Issue 13, p1547
Academic Journal
Demonstrates three-dimensionally confined semiconductor heterostructures through a one step growth on nonplanar patterned substrates. Importance of employing substrate encoded size reducing epitaxy; Observation of the triangular mesa tops linear dimension; Identification of three spatial regions in nonplanar pattered substrates.


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