TITLE

Anomalous diffusion of nitrogen in SiO[sub 2] under ion bombardment

AUTHOR(S)
Banerjee, Indrajit; Kuzminov, Dimitry
PUB. DATE
March 1993
SOURCE
Applied Physics Letters;3/29/1993, Vol. 62 Issue 13, p1541
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the anomalous nitrogen diffusion in silicon (Si) substrate under ion bombardment using depth profiling through secondary ion mass spectrometry. Existence of nitride layer at the Si/oxide interface; Confirmation on the absence of nitrogen tail in Si substrates; Observation of nitrogen-oxygen complexes in the substrates.
ACCESSION #
4338132

 

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