TITLE

Effect of oxygen concentration on the kinetics of thermal donor formation in silicon at

AUTHOR(S)
Londos, C.A.; Binns, M.J.; Brown, A.R.; McQuaid, S.A.; Newman, R.C.
PUB. DATE
March 1993
SOURCE
Applied Physics Letters;3/29/1993, Vol. 62 Issue 13, p1525
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the effect of oxygen concentration on the kinetics of thermal donor formation in silicon. Determination of atom contents in the core of the defects; Observation of silicon dependency; Effects of oxygen dimerization.
ACCESSION #
4338126

 

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