Effect of oxygen concentration on the kinetics of thermal donor formation in silicon at

Londos, C.A.; Binns, M.J.; Brown, A.R.; McQuaid, S.A.; Newman, R.C.
March 1993
Applied Physics Letters;3/29/1993, Vol. 62 Issue 13, p1525
Academic Journal
Examines the effect of oxygen concentration on the kinetics of thermal donor formation in silicon. Determination of atom contents in the core of the defects; Observation of silicon dependency; Effects of oxygen dimerization.


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