TITLE

Uniform plasma produced by a plane slotted antenna with magnets for electron cyclotron resonance

AUTHOR(S)
Sato, N.; Iizuka, S.; Nakagawa, Y.; Tsukada, T.
PUB. DATE
March 1993
SOURCE
Applied Physics Letters;3/29/1993, Vol. 62 Issue 13, p1469
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Demonstrates the production of a uniform electron cyclotron resonance plasma. Factors hindering the production of plasma uniformity in front of the substrates; Supervision of backward and forward microwave powers in the rectangular waveguide section; Magnetic polarity of the first and third rings.
ACCESSION #
4338107

 

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