TITLE

Nonpolymer new organic film for local insulation in laser-direct-writing circuit

AUTHOR(S)
Seki, Y.; Morishige, Y.; Wamme, N.; Ohnishi, Y.; Kishida, S.
PUB. DATE
June 1993
SOURCE
Applied Physics Letters;6/21/1993, Vol. 62 Issue 25, p3375
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents a localized insulating circuit restructuring technology for large-scale integrated circuits. Use of ethanol rinsing in removing unnecessary part of the organic film; Effect of acid solution on aluminum interconnections; Fabrication Via holes using laser ablation.
ACCESSION #
4338096

 

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