Optical functions of chemical vapor deposited thin-film silicon determined by spectroscopic

Jellison Jr., G.E.; Chisholm, M.F.; Gorbatkin, S.M.
June 1993
Applied Physics Letters;6/21/1993, Vol. 62 Issue 25, p3348
Academic Journal
Examines the optical functions of chemical vapor deposited thin-film silicon (Si) using spectroscopic ellipsometry. Simulation on the standard technique for the optical functions of polycrystalline Si; Use of transmission electron microscopy in measuring film thickness.


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