Laser-assisted liquid film etching

Lim, P.; Brock, J.; Trachtenberg, I.
June 1993
Applied Physics Letters;6/21/1993, Vol. 62 Issue 25, p3345
Academic Journal
Presents the laser-assisted liquid film etching technique for silicon substrate patterning. Use of gas phase substrates in photoassisted etching; Effect of hydrofluoric acid on thin liquid films; Role of polyvinyl alcohol as a wetting agent in thin film coating.


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