Spectroscopic ellipsometry studies of HF treated Si (100) surfaces

Huade Yao; Woollam, John A.; Alterovitz, Samuel A.
June 1993
Applied Physics Letters;6/21/1993, Vol. 62 Issue 25, p3324
Academic Journal
Examines the spectroscopic ellipsometry (SE) studies on high frequency treated silicon (Si) surfaces. Observations of Si surface roughness in an ultrahigh vacuum chamber; Discussion on the desorption evidence of hydrogen-terminated Si surface layer; Use of SE in characterizing surface overlayer thickness and optical constants.


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