TITLE

Spectroscopic ellipsometry studies of HF treated Si (100) surfaces

AUTHOR(S)
Huade Yao; Woollam, John A.; Alterovitz, Samuel A.
PUB. DATE
June 1993
SOURCE
Applied Physics Letters;6/21/1993, Vol. 62 Issue 25, p3324
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the spectroscopic ellipsometry (SE) studies on high frequency treated silicon (Si) surfaces. Observations of Si surface roughness in an ultrahigh vacuum chamber; Discussion on the desorption evidence of hydrogen-terminated Si surface layer; Use of SE in characterizing surface overlayer thickness and optical constants.
ACCESSION #
4338079

 

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