Atomic configuration dependent secondary electron emission from reconstructed silicon surfaces

Homma, Yoshikazu; Suzuki, Mineharu; Tomita, Masato
June 1993
Applied Physics Letters;6/21/1993, Vol. 62 Issue 25, p3276
Academic Journal
Examines the effect of atomic configuration on secondary electron (SE) emission from reconstructed silicon surfaces. Use of scanning electron microscopy for imaging surface topography; Sensitivity of SE emission to the atomic configuration; Evaluation of the relationship between the detection angle and dimer rows.


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