Epitaxial growth and surface-acoustic-wave properties of LiTaO[sub 3] films grown by pulsed

Shibata, Yoshihiko; Kaya, Kiyoshi; Akashi, Kageyasu; Kanai, Masaki; Kawai, Tomoji; Kawai, Shichio
June 1993
Applied Physics Letters;6/7/1993, Vol. 62 Issue 23, p3046
Academic Journal
Examines the growth of lithium tantalate films on sapphire substrates using pulsed excimer-laser ablation technique. Substrate orientations of the films; Evaluation on the surface-acoustic-wave properties of the materials; Deposition condition for film preparation.


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