TITLE

Imaging-plate plane-wave x-ray topography of local lattice distribution due to growth striations

AUTHOR(S)
Maekawa, I.; Kudo, Y.; Kojima, S.; Kawado, S.; Ishikawa, T.
PUB. DATE
June 1993
SOURCE
Applied Physics Letters;6/7/1993, Vol. 62 Issue 23, p2980
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the effectiveness of an imaging-plate plane-wave x-ray topography (PPWT) method in the quantitative analysis of local lattice distortion in silicon crystals. Comparison with the conventional photographic-plate PPWT; Factors attributing the lattice distribution of silicon crystals; Orientation of surfaces to growth direction.
ACCESSION #
4338020

 

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