TITLE

Observation of electromigration of hydrogen in polycrystalline silicon using poly emitter

AUTHOR(S)
Zhao, J.; Li, G.P.; Liao, K.Y.; Chin, M.R.; Sun, J.Y.-C.
PUB. DATE
June 1993
SOURCE
Applied Physics Letters;6/7/1993, Vol. 62 Issue 23, p2950
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the electromigration of hydrogen inside polycrystalline silicon. Use of poly emitter bipolar transistors; Application of current gain to monitor the electromigration phenomena; Characteristics of hydrogen electromigration.
ACCESSION #
4338010

 

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