Photoluminescence from stain-etched polycrystalline Si thin films

Steckl, A.J.; Xu, J.; Mogul, H.C.
April 1993
Applied Physics Letters;4/26/1993, Vol. 62 Issue 17, p2111
Academic Journal
Examines the photoluminescence of stain-etched polycrystalline Si thin films. Deposition of poly-Si thin films on oxidized Si and quartz substrates; Production of stain-etched doped and undoped poly-Si films; Acquisition of luminescent patterns with sub-micrometer dimensions.


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