TITLE

Epitaxy enhancement of beta-FeSi[sub 2] grown by ion beam assisted deposition

AUTHOR(S)
Terrasi, A.; Ravesi, S.; Grimaldi, M.G.; Spinella, C.
PUB. DATE
April 1993
SOURCE
Applied Physics Letters;4/26/1993, Vol. 62 Issue 17, p2102
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Evaluates the beta-FeSi[sub 2] epitaxy enhancement through ion beam assisted deposition. Formation of polycrystalline FeSi; Acquisition of the beta-FeSi[sub 2] epitaxy; Analysis of samples through transmission electron microscopy and Rutherford backscattering spectroscopy.
ACCESSION #
4337977

 

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