TITLE

Hydrogen enhancement of silicon thermal donor formation

AUTHOR(S)
Lamp, C.D.; James II, D.J.
PUB. DATE
April 1993
SOURCE
Applied Physics Letters;4/26/1993, Vol. 62 Issue 17, p2081
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the silicon thermal donor formation hydrogen enhancement. Characterization of oxygen-related thermal donor; Defects of the thermal donor after hydrogenation; Function of depth for reference and hydrogenated samples.
ACCESSION #
4337970

 

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