TITLE

Atomic layer epitaxy of AlAs using trimethylamine-alane and amino-As

AUTHOR(S)
Fujii, Kazuyuki; Suemune, Ikuo; Yamanishi, Masamichi
PUB. DATE
March 1993
SOURCE
Applied Physics Letters;3/22/1993, Vol. 62 Issue 12, p1420
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the atomic layer epitaxy (ALE) of AlAs using trimethylamine-alane and tris-dimethylamino-arsenic. Observation of self limiting AlAs growths; Examination of self-limiting mechanism of ALE using transient quadrupole mass spectrometry; Consideration of aluminum surface properties for self-limiting growth factor discussion.
ACCESSION #
4337937

 

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