TITLE

Heteroepitaxy of beta-FeSi[sub 2] on unstrained and strained Si(100) surfaces

AUTHOR(S)
Peale, D.R.; Haight, R.; Ott, J.
PUB. DATE
March 1993
SOURCE
Applied Physics Letters;3/22/1993, Vol. 62 Issue 12, p1402
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the heteroepitaxial growth of semiconducting beta-FeSi[sub 2] on strained and unstrained silicon(100) surfaces. Growth operations at ultrahigh vacuum conditions; Use of low energy electron diffraction; Dependence of silicide domain size on mismatch lattices.
ACCESSION #
4337930

 

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