TITLE

Growth of GaAsN alloys by low-pressure metalorganic chemical vapor deposition using

AUTHOR(S)
Weyers, Markus; Sato, Michio
PUB. DATE
March 1993
SOURCE
Applied Physics Letters;3/22/1993, Vol. 62 Issue 12, p1396
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the growth of gallium arsenic nitride alloys by low-pressure metalorganic chemical vapor deposition using plasma-cracked ammonia. Decomposition of ammonia in a remote microwave plasma; Dependence of nitrogen (N) uptake on growth temperature; Reduction of N content at higher AsH[sub 3] fluxes.
ACCESSION #
4337928

 

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