Step equalization in epitaxial growth: A noise limited process

Williams, D.R.M.; Krishnamurthy, Mohan
March 1993
Applied Physics Letters;3/22/1993, Vol. 62 Issue 12, p1350
Academic Journal
Presents the result of Monte Carlo simulation of terrace size evolution by vapor phase growth on vicinal surfaces. Formation of uniform terraces following vicinal surfaces growth; Inclusion of step destruction and creation on statistical fluctuations; Use of tilted superlattices on terrace width estimates.


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