TITLE

Step equalization in epitaxial growth: A noise limited process

AUTHOR(S)
Williams, D.R.M.; Krishnamurthy, Mohan
PUB. DATE
March 1993
SOURCE
Applied Physics Letters;3/22/1993, Vol. 62 Issue 12, p1350
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents the result of Monte Carlo simulation of terrace size evolution by vapor phase growth on vicinal surfaces. Formation of uniform terraces following vicinal surfaces growth; Inclusion of step destruction and creation on statistical fluctuations; Use of tilted superlattices on terrace width estimates.
ACCESSION #
4337911

 

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