TITLE

Negative ion mass spectra and particulate formation in radio frequency silane plasma deposition

AUTHOR(S)
Howling, A.A.; Dorier, J.-L.; Hollenstein, Ch.
PUB. DATE
March 1993
SOURCE
Applied Physics Letters;3/22/1993, Vol. 62 Issue 12, p1341
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the negative ion mass spectra and particulate formation in radio frequency (rf) silane plasma deposition experiments. Use of mass spectrometer in measuring mass spectra; Presence of negative ion on lower power frequency; Effectiveness of low-frequency mixture in producing rf modulation.
ACCESSION #
4337908

 

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