Negative ion mass spectra and particulate formation in radio frequency silane plasma deposition

Howling, A.A.; Dorier, J.-L.; Hollenstein, Ch.
March 1993
Applied Physics Letters;3/22/1993, Vol. 62 Issue 12, p1341
Academic Journal
Examines the negative ion mass spectra and particulate formation in radio frequency (rf) silane plasma deposition experiments. Use of mass spectrometer in measuring mass spectra; Presence of negative ion on lower power frequency; Effectiveness of low-frequency mixture in producing rf modulation.


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