TITLE

Ion bombardment energy distributions in a radio frequency induction plasma

AUTHOR(S)
Hopwood, J.
PUB. DATE
March 1993
SOURCE
Applied Physics Letters;3/1/1993, Vol. 62 Issue 9, p940
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Measures the ion bombardment energy distributions in a radio frequency induction plasma. Determination of the ion bombardment spectra; Observation of double-peaked distribution in water vapor plasmas; Characterization of ion flux for heavier ionic energies.
ACCESSION #
4337867

 

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