Ion bombardment energy distributions in a radio frequency induction plasma

Hopwood, J.
March 1993
Applied Physics Letters;3/1/1993, Vol. 62 Issue 9, p940
Academic Journal
Measures the ion bombardment energy distributions in a radio frequency induction plasma. Determination of the ion bombardment spectra; Observation of double-peaked distribution in water vapor plasmas; Characterization of ion flux for heavier ionic energies.


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