Deposition of dense hydrocarbon films from a nonbiased microwave plasma

von Keudell, A.; Moller, W.; Hytry, R.
March 1993
Applied Physics Letters;3/1/1993, Vol. 62 Issue 9, p937
Academic Journal
Examines the deposition of dense hydrocarbons films from a nonbiased microwave plasma. Preparation on C:H layers from methane; Dependence of temperature on deposition rate; Identification of the different deposition processes.


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